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Events | April 27, 2023
Taking place this week in Phoenix, Arizona, the 45th Annual 2023 International High Technology ESH Symposium & Exposition included a seminar by C&IH Director of Engineering Daniel Hall titled, “Evaluating Optimal Ambient Gas Detector Placement and Other EHS Solutions Using Computational Fluid Dynamics (CFD) Modeling.”
Gas detection in semiconductor factories is an important component of safety solutions and risk management. Codes and standards, such as the International Fire Code and NFPA 318 provide minimum requirements for gas detection and mandate continuous detection in areas where hazardous gases are used, both within exhausted enclosures and in ambient room areas. Ambient area leak detection is more challenging than enclosure monitoring due to the large volume of dilution air complex airflow dynamics. Computational fluid dynamics (CFD) is an adaptable software tool that can be customized to unique three-dimensional spaces with as much geometric detail and physics of the environment as necessary to simulate airflow and gas dispersion. In this presentation, we will highlight the use of CFD to simulate complex airflow pathways in a typical subfab to contribute to more effective gas detector placement. Additionally, we will demonstrate other CFD applications such as regenerative thermal oxidizer exhaust contaminant dispersion, cleanroom interstitial space supply air thermal distribution, and fabrication tool exhaust capture efficiency.
If you would like to learn more about the application of CFD in managing occupational health risk, please contact us to set up a time to visit with our modeling team.